Easy to acquire data for all specimen types

Scanning electron microscopes (SEMs) are indispensable tools not only for research but also for quality assurance and manufacturing sites. At those scenes, the same observation processes need to be performed repeatedly and there has been a need to improve the efficiency of the process.

With the JSM-IT510, the newly added Simple SEM function allows users to "leave the manual repetitive operation to it", required for SEM observation, making SEM observation more efficient and easier.

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Features

1. Simple SEM

Just select the target field

Simple SEM supports daily routine work.

Specimen: Electronic device
Accelerating voltage: 15 kV, (Top) Magnification: ×50 (Bottom) ×1,000, Signal: BE

2. Specimen Exchange Navi

Guide from specimen exchange to automatic observation. Safe and simple!

First, follow the Navi guide to set specimen:

Next, prepare for observation during evacuation:

¹ Stage Navigation System (SNS) is an option.
² SNS Large Sample (SNSLS) is an option. Compatible with SNS.
³ Chamber Scope (CS) is an option.

Lastly, start observation automatically, with automatic image formation after evacuation

3. Zeromag

Magnify the optical image¹, transition to SEM image.

The Zeromag function simplifies navigation providing a seamless transition from the optical to SEM image. The SEM, optical image and holder graphic are all linked for a global view of analysis locations.

¹ Stage Navigation System (SNS) is needed to display the optical image.

Specimen: Fossil of ammonite
Accelerating voltage: 7 kV, Signal: BE

4. Live Analysis / Live Map²

Embedded EDS for Real-Time elemental composition during observation

Live Analysis is a function which displays the EDS spectrum or element maps in Real-Time during image observation. This function can support searching and provide an alert for target elements.

² Live Analysis is a standard for A (Analysis) / LA (Low Vacuum & Analysis).

Specimen: Fossil of ammonite
Accelerating voltage: 15 kV, Magnification: ×1,000

Simple analysis - the EDS analysis can be started within 3 clicks.

5. Variety of advanced options

Low-vacuum Hybrid Secondary Electron Detector (LHSED)^*

This new detector collects both electron and photon signals providing an image with high S/N and enhanced topographic information.

^* LHSED is an option. And LV (Low Vacuum) or L A (Low Vacuum & Analysis) is also required.

The mechanism of LHSED
Specimen: Plaster
Accelerating voltage: 7 kV, Magnification: x10,000, Signal: LV SE

Live 3D^*

The images obtained by a new quadrant BE detector* can be displayed as a live 3D image. 3D images can clearly represent the shape of a specimen, even for those with subtle topographic information.

^* Live 3D is a standard in LV (Low Vacuum), LA (Low Vacuum & Analysis). BE detector (option) can be equipped on BU (Base Unit), A (Analysis).

Specimen: Screw
Accelerating voltage: 15 kV Magnification: x100 Signal: BE

Montage

Montage function automates large area image collection and stitching of these images into a composite image.

Specimen: Fossil of ammonite
Accelerating voltage: 15 kV, Magnification: x150, Signal: BE, Number of field: 13 x 13

Stage Navigation System (SNS) is needed to display the optical image.

Display the depth of signal

This function displays the analysis depth (approx.) in the specimen. For element analysis, it is very useful.

BU (Base Unit)	Basic type for observation under high vacuum
A (Analysis)	Analysis type, EDS is attached on BU as a standard
LV (Low Vacuum)	Low Vacuum type, for high and low vacuum operation. BED included.
LA (Low Vacuum & Analysis)	Low vacuum type, for high and low vacuum operation, BED and EDS included.

Resolution	High vacuum mode 3.0 nm (30 kV), 15.0 nm (1.0 kV) Low vacuum mode※1 4.0 nm (30 kV BED)
Photo magnification	×5 to ×300,000  (Defined with a photo size of 128 mm × 96 mm)
Display magnification	×14 to ×839,724 (Defined with a photo size of 358 mm × 296 mm)
Electron gun	W filament, fully automatic gun alignment
Accelerating voltage	0.3 kV to 30 kV
LV pressure adjustment※1	10 to 650 Pa
Objective lens aperture	Four stage, with XY fine adjustment function
Automatic function	Filament adjustment, Gun alignment adjustment Beam alignment Focus/ Astigmatism / Brightness / Contrast correction
Maximum specimen size	200 mm diameter × 75 mm height 200 mm diameter × 80 mm height※3 32 mm diameter × 90 mm height※3
Specimen stage	Large eucentric stage X：125 mm　Y：100 mm　Z：80 mm tilt: -10 to 90° rotation: 360°
Image mode	Secondary electron image, REF image, Compositional image* 1 Topographic image※1, Shadow image※1、PD image※4
Image size	640 × 480　1,280 × 960 2,560 × 1,920　5,120 × 3,840
Photo assist function	Montage, Simple SEM, Zeromag, Live 3D
Operation support function	Recipe (Standard recipe / Custom recipe) Measurement (distance between 2 points, distance between parallel lines, angle, diameter etc.) Specimen exchange navi Signal depth function 3D measurement※5
OS	Microsoft® Windows®10 64bit
Observation monitor	23.8 inch touch panel
EDS functions※2	Refer to EDS specification
Data management	SMILE VIEW™ Lab
Report generation One-click report	Output to Microsoft®Word Output to Microsoft®PowerPoint※6
Language switch	Japanese, English, Chinese※7 (operable on UI)
Vacuum system	Full automatic, TMP: 1, RP: 1 or 2※1

• Backscattered Electron Detector (BED)*¹

• Low Vacuum Hybird Secondary Electron Detector (LHSED)

• Low Vacuum Secondary Electron Detector (LVSED)

• Energy Dispersive X-ray Spectrometer (EDS)*²

• Wavelength Dispersive X-ray Spectrometer (WDS)

• Electron Backscatter Diffraction Pattern (EBSD)

• Load Lock Chamber (pre-evacuation chamber)

• Stage Navigation System (SNS)

• Stage Navigation System Large Sample (SNSLS)

• Chamber Scope (CS)

• Operation Panel (OP2)

• LaB₆Electron Gun (LAB₆)

• 3D Analysis Software (SVM)

• Table (TBL)

Applicable to A (Analysis) / LA (Low Vacuum & Analysis)
●：Standard　○：Option

		Standard
Control PC	OS：Microsoft®Windows®10 64bit※8	●
Language	Japanese / English / Chinese※7	●
Detector	SDD type	Select from the detector list
Spectral analysis	Qualitative analysis (peak identification, automatic qualitative analysis) Visual peak ID Standard-less quantitative analysis (ZAF method) Standard quantitative analysis (ZAF method)※9 PHI-RHO-Z (PRZ) method: quantitative correction method QBase (Qualitative analysis database)	●
Line analysis	Line analysis (parallel & arbitrary direction)	●
Elemental map	Elemental map (map with multiple colors, monochrome, multiple-color superimposition) Maximum pixel resolution: 4,096 × 3,072 Real-time pop-up spectrum Deconvolution map (net count map, quantitative map) Real-time net count map Real-time filter Line profile display Probe tracking Playback analysis (time resolved spectral map)	●
Serial analysis	Spectral analysis, Line analysis, Elemental map Comprehensive analysis of already-analyzed data (qualitative & quantitative analysis)	●
Montage	Automatic montage (SEM image, Elemental map) Serial elemental mapping for multiple areas	●
Particle analysis software	・Particle analysis (auto / manual) & EDS analysis, 　Classification of particle analysis data, 　Graph display of statistical processed particle analysis data, 　Large-area serial particle analysis ・GSR (Gun Shot Residue) library ・Metal feature analysis library ・Automobile parts cleanliness analysis library	○   ○ ○ ○
Report generation	SMILE VIEW™ Lab Output as Microsoft®Word, Microsoft®PowerPoint file※6	●
SEM integration	Integrated management of observation & analysis data Specifying analysis position on the SEM operation screen (Direct analysis on UI for SEM) Graphical display of analysis positions	●
Help function	Help guide	●
Dual detector	Analysis with two detectors※10	○
Off-line function	License software for off-line data analysis	○

¹ Standard in JSM-IT510LV / LA.
² Standard in JSM-IT510A / LA.
³ An optional holder is required.
⁴ LHSED (option) is required.
⁵ SVM (option) is required.
⁶ Microsoft® Offce must be installed.
⁷ Chinese is optional.
⁸ For JSM-IT510A / LA, EDS software is installed on the same PC as SEM control software.
⁹ The optional probe current compensation unit (option) is required. Automatic monitoring of the probe current is possible only when EDS is connected to the microscope PC.
¹⁰ Two EDS detectors with the same active sensor size are required. There is a limitation for stage movements depending on installation ports.

Specifications subject to change without notice.
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Microsoft Word is a product name of Microsoft Corporation.