JSM-IT500HR Scanning Electron Microscope

JSM-IT500HR Scanning Electron Microscope

The JSM-IT500HR SEM, based on the highly successful and award winning JEOL InTouchScope series, is equipped with a high-brightness electron gun and fully integrating JEOL's energy dispersive X-ray spectrometer (EDS). This revolutionizing JSM-IT500HR is a superb high throughput SEM, delivering a dramatically improved work efficiency (40% or higher than conventional models).

JEM-Z300FSC (CRYO ARM) Electron Microscope

JEM-Z300FSC / JEM-Z200FSC Cryo-Electron Microscope

CRYO ARM is an electron microscope for observing biomolecules such as proteins at cryo temperature. The microscope equips a cold field-emission electron gun, an in-column Omega energy filter, a side-entry liquid nitrogen cooling stage, and an automated specimen exchange system. The specimen exchange system can store up to 12 specimens in the specimen exchange chamber.

JSM-IT200 Scanning Electron Microscope

JSM-IT200 Scanning Electron Microscope

Fast observation, analysis and report generation! JSM-IT200 is an easy-to-use scanning electron microscope focused on cost performance of high functionalities of JSM-IT500 (higher-end model) of InTouchScope, with significantly higher throughput.

Electron Microscopy, NMR & Mass Spectometry News

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Electron Microscopy News

Our latest blogs on (Scanning) Electron Microscopes, NMR & Mass Spectometry

JEM-ARM300F: The Ultimate Atomic Resolution Transmission Electron Microscope

Transmission electron microscopy (TEM) has long been a tool essential for micro structure evaluation in the field of materials development.
However, as the fine structures of advanced materials are being designed at the nano level or atomic level, the synthetic process for such materials increasingly requires imaging and analysis at higher resolution.

To meet this demand, JEOL has focused on development of a transmission electron microscope incorporating spherical aberration correctors to exceed the current resolution boundary.
In 2009, JEOL announced the JEM-ARM200F, a 200 kV atomic resolution analytical transmission electron microscope featuring spherical aberration correctors, which achieved a resolution of 80 pm (scanning transmission (STEM) image) as the first ever commercial electron microscope.  To achieve the atomic level resolution, the JEM-ARM200F incorporates various capabilities to ensure highly stable operation.  With over 100 units of the ARM200F currently in operation worldwide, many researchers have become familiar with atomic level imaging and analysis.

JEM-ARM300F
Meanwhile, as aberration correctors are widely used, various new requirements for transmission electron microscopy are emerging, in addition to higher resolution, including higher analytical sensitivity, in-situ imaging, flexible accelerating voltage control, and ease of operation for aberration correction.

Thus, JEOL developed the JEM-ARM300F, a 300 kV atomic resolution transmission electron microscope featuring JEOL's own aberration correctors as an enhanced model of the JEM-ARM200F.
Nicknamed GRAND ARM, the JEM-ARM300F, incorporates JEOL's propriety dodecapole correctors, successfully increasing the resolution level to 63 pm (STEM resolution).
The GRAND ARM can be configured for ultra high resolution imaging or analytical applications for high sensitivity and in-situ analysis according to the user's needs.


The system is primarily intended for public and private research institutes and semiconductor manufacturers.

Main Features

  1. Ultra high resolution imaging
    Achieves a resolution of 63 pm in the scanning transmission electron microscope image (STEM) mode at an accelerating voltage of 300 kV, using JEOL's own spherical aberration corrector for the illumination system.
  2. High performance cold-cathode field-emission electron gun featuring high brightness and low energy dispersion
    Incorporates a new high performance cold cathode electron gun as standard; the high brightness beam with minimum chromatic aberration allows for high resolution imaging and analysis.
  3. Wide accelerating voltage range
    Supports accelerating voltage levels of 300 kV and 80 kV as standard; other accelerating voltage levels are optionally available as needed.
  4. Aberration corrector integrated with microscope base unit
    Incorporates JEOL's proprietary spherical aberration correctors in the image forming system (TEM aberration corrector) and in the illumination system (STEM spherical aberration corrector).
  5. Aberration corrector control system
    Uses the JEOL COSMO (JEOL Corrector System Module) system for auto control of the aberration correctors.
  6. Two types of objective lens pole piece
    Two types of objective lens polepiece are available to meet a wide range of users' applications.
  7. Vacuum system featuring dry pre-evacuation and high vacuum
    The vacuum system features a pre-evacuation system incorporating a turbo molecular pump as standard and an enhanced column evacuation system, achieving higher vacuum while minimizing contamination and damage in atomic level imaging and analysis.
  8. Stable column/console, specimen stage, and electrical system
    The column, 330 mm in diameter, features a higher level of mechanical rigidity.  The microscope base unit is also designed to enhance its mechanical/electrical stability and resistance to environment, fully utilizing the stabilizing technologies developed for the JEM-ARM200F.
  9. A complete line of signal detectors
    A complete line of signal detectors are available, including EDS (energy dispersive X-ray spectrometer) up to 100 mm2and EELS (electron energy loss spectrometer), backscattered electron detectors, and up to 4 STEM detectors.  The microscope also supports simultaneous observation of high angle annular dark field image, low angle annular dark field image, annular bright field image, and bright field image.

Main Specifications

Accelerating voltage Maximum 300 kV
TEM lattice resolution 0.05 nm(with spherical aberration corrector for image forming system)
STEM resolution 0.063 nm(spherical aberration corrector for illumination system)

 

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JCM-6000 ”NeoScope™”, A New Desktop Scanning Electron Microscope

JEOL's JCM-5000 NeoScope, since it was announced, has been widely used by electronics manufacturers, including semiconductor device makers, as a desktop scanning electron microscope featuring the same ease of operation as optical microscopes for inspection of the products developed and processed by micro technologies. The new JCM-6000 "NeoScopeTM," is a touch panel controlled, multi functional desktop scanning microscope that answers the increasingly diversified needs among users worldwide. Nikon has joined JEOL to sell the Neoscope.

Features

1) Simple operation

  • Easy touch panel operation
  • A complete range of automated functions (auto focus, auto stigmator, auto contrast/brightness)
  • Easy, dependable auto gun alignment (filament centering)

2) Enhanced low vacuum capability

  • Enhanced quality of backscattered electron images
  • Easy observation of non conductive samples in the direct low vacuum mode
  • Only 2 minutes 30 seconds from sample loading to imaging

3) New capabilities for imaging

  • Secondary electron imaging and backscattered electron imaging supported at high vacuum
  • Dual frame imaging to facilitate comparison of live and retrieved images
  • A wide magnification range from the lowest 10x for wide area of view up to 60,000x

4) A complete line of optional accessories

  • Energy dispersive X-ray spectrometer
  • Tilt/rotation motor drive specimen holder

    *Both options are retrofittable

5) Compact, light, and energy saving

  • Base unit: 330mm (W) x 490mm (D) x 430mm (H); 50 kg
  • Utility: Single phase 100 V to 240 V, 50/60 Hz, 700 to 960 VA

JPS-9030: The XPS for high-speed, high-precision depth profiling

In recent years, there has been a growing demand to perform high quality surface analysis quickly, easily and reproducibly on any kind of sample for any level user. The JPS-9030 is equipped with a newly-designed user interface that further improves operability and also debuts a sophisticated, new modern and sleek exterior design.

Main Features

  1. Depth profiling optimized for the application
    The newly-developed Kaufman-type etching ion source provides etching rates from 1 nm/min to 100 nm/min (SiO2equivalent), and allows a wide range of settings. It is capable of depth profiles suitable for any application, from measurements demanding precision to processes that require speed. The mounting of the Kaufman-type etching ion source to the specimen exchange chamber facilitates prevention of  contamination of the measurement chamber.
  2. Newly-developed software provides even greater ease-of-use
    SpecSurf Ver. 2.0 now incorporates a ribbon-style GUI, offering a user-friendly environment in which all operations can be performed with the mouse. With JEOL’s own automatic qualitative analysis function, it is possible to sequentially perform qualitative, quantitative and chemical state analyses for multiple acquisition points.
  3. Ultra-high surface sensitivity
    The JPS-9030 supports techniques like Angle-Resolved XPS (ARXPS) and Total Reflection XPS (TRXPS), and is capable ultra-high sensitive analysis of the top surfaces of 1 nm (standard measurement method 6 nm or more).
  4. A wealth of options
    • Monochromatic X-ray sources
    • Argon gas cluster ion source suitable for organic samples
    • Infra-red heating system capable of temperatures of 1,000°C or higher
    • Transfer vessel to protect specimens from exposure to the atmosphere

Main Specifications

Intensity
(MgKα, 300W equivalent)
1,000,000 cps or more (at Ag3d5/2FWHM is 1.0 eV)
X-ray source Mg/Al twin anode
Input-lens system Cylindrical electrostatic lens
Energy analyzer Electrostatic hemispherical analyzer
Energy sweep method Constant Analyzer Energy and Constant Retarding Ratio
Detector multichannel plate
Ion gun Kaufman type ion gun
Base pressure 7 × 10-8Pa or better
Bake-out system Built-in heater, automatic control
JPS-9030

JEM-2100Plus: A new 200kV Transmission Electron Microscope

The JEM-2100Plus is a multi purpose transmission electron microscope for micro structure evaluation, which combines the proven JEM-2100 optic system with an advanced control system for enhanced ease of operation. Achieving superior performance through very user friendly intuitive operation, the JEM-2100Plus provides solutions to a wide range of applications from materials science to medical/biological studies.

Main Features


Designed to ease of operation

  1. 64 bit Windows® compatible control software, TEM Center, is an intuitive user interface designed to maximize ease of operation.
  2. A complete range of automated functions
    The JEM-2100Plus comes with a complete range of automated functions, including auto focus, auto contrast/brightness, auto exposure, auto montage, drift compensation, and stage navigation.
  3. Advanced integration
    The TEM Center allows the user to control optional accessories such as high resolution camera and scanning image (BF/DF) observation device through intuitive user-system interaction.
  4. Image view/edit software
    Viewer software supports off-line image viewing and editing.

Notices:Windows is a registered trademark of Microsoft Corporation in the United States and other countries.

Main Specifications

Maximum accelerating voltage 200kV
Guaranteed resolution 0.14 nm(TEM lattice image)
Magnification x30 to x800,000
The JEM-2100Plus can be configured to support a variety of applications from cryo TEM to ultra high resolution imaging.


JEM-2100Plus